Micro- and Nanotechnologies

tu-ilmenau.de

Key facts

Collected automatically from the institution’s website; the institution’s own page is authoritative.

Degree: Master of Science (M.Sc.)
Standard duration: 4 semesters (2 years)
ECTS credits: 120 ECTS
Start of studies: Winter semester
Mode of study: Full-time, Part-time
Teaching language: English
Admission: Open admission, aptitude procedure
Location: Ilmenau
Tuition fees: No tuition fees
Semester contribution: €303.80 per semesterfor all students at the university

Information from tu-ilmenau.de · checked on 30 September 2026

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Systems Engineering for Micro-Electro-Mechanical Systems or Biomedical Micro Engineering
M.Sc.
Hochschule Kaiserslautern · Zweibrücken
3 semesters German and English Full-time, Part-time Winter semester and Summer semester No tuition fees
Microsystems Engineering
M.Sc.
Albert-Ludwigs-Universität Freiburg · Freiburg im Breisgau
4 semesters English Full-time Winter semester Open admission No tuition fees for EU students · non-EU: €1,500 per semester
Mikrosystemtechnik (taught in German)
M.Sc.
Albert-Ludwigs-Universität Freiburg · Freiburg im Breisgau
4 semesters German and English Full-time Winter semester and Summer semester Open admission No tuition fees for EU students · non-EU: €1,500 per semester
Micro and Nano Systems
M.Sc.
Technische Universität Chemnitz · Chemnitz
4 semesters English Full-time Winter semester Open admission No tuition fees
Mikrosysteme und Mikroelektronik
M.Sc.
Technische Universität Chemnitz · Chemnitz
4 semesters German Full-time Winter semester Open admission No tuition fees
Mikrosystemtechnik
M.Sc.
Hochschule für Technik und Wirtschaft Berlin · Berlin
4 semesters German and English Full-time Winter semester Open admission No tuition fees

Communications and Signal Processing
M.Sc.
Ilmenau
4 semesters English Full-time, Part-time Winter semester Open admission, aptitude procedure No tuition fees
Elektrische Energiesysteme
M.Sc.
Ilmenau
4 semesters German Full-time, Part-time Winter semester and Summer semester Open admission, aptitude procedure No tuition fees
Elektrotechnik und Informationstechnik
M.Sc.
Ilmenau
4 semesters German Full-time, Part-time Winter semester and Summer semester Open admission, aptitude procedure No tuition fees
Regenerative Energietechnik
M.Sc.
Ilmenau
4 semesters German Full-time, Part-time Winter semester and Summer semester Open admission, aptitude procedure No tuition fees
Elektrotechnik und Informationstechnik
B.Sc.
Ilmenau
6 semesters German Full-time, Part-time Winter semester Open admission No tuition fees
Betriebswirtschaftslehre mit technischer Orientierung
M.Sc.
Ilmenau
4 semesters German Full-time, Part-time Summer semester and Winter semester Open admission No tuition fees