Micro and Nano Systems

tu-chemnitz.de

Key facts

Collected automatically from the institution’s website; the institution’s own page is authoritative.

Degree: Master of Science (M.Sc.)Consecutive master
Standard duration: 4 semesters (2 years)
ECTS credits: 120 ECTS
Start of studies: Winter semester
Mode of study: Full-time
Teaching language: English
Admission: Open admission
Location: Chemnitz
Tuition fees: No tuition fees
Semester contribution: €341.40 per semesterfor all students at the university

Information from tu-chemnitz.de · checked on 30 September 2026

Report an error

Systems Engineering for Micro-Electro-Mechanical Systems or Biomedical Micro Engineering
M.Sc.
Hochschule Kaiserslautern · Zweibrücken
3 semesters German and English Full-time, Part-time Winter semester and Summer semester No tuition fees
Microsystems Engineering
M.Sc.
Albert-Ludwigs-Universität Freiburg · Freiburg im Breisgau
4 semesters English Full-time Winter semester Open admission No tuition fees for EU students · non-EU: €1,500 per semester
Mikrosystemtechnik (taught in German)
M.Sc.
Albert-Ludwigs-Universität Freiburg · Freiburg im Breisgau
4 semesters German and English Full-time Winter semester and Summer semester Open admission No tuition fees for EU students · non-EU: €1,500 per semester
Mikrosystemtechnik
M.Sc.
Hochschule für Technik und Wirtschaft Berlin · Berlin
4 semesters German and English Full-time Winter semester Open admission No tuition fees
NanoEngineering
M.Sc.
Universität Duisburg-Essen · Duisburg
4 semesters English Full-time Winter semester Open admission No tuition fees
Medical Microtechnology
M.Sc.
Technische Hochschule Lübeck · Lübeck
4 semesters English Full-time Winter semester Open admission No tuition fees

Design and Test for Integrated Circuits
M.Sc.
Chemnitz
4 semesters English Full-time Winter semester and Summer semester Open admission
Elektromobilität
M.Sc.
Chemnitz
4 semesters German Full-time Winter semester and Summer semester Open admission No tuition fees
Information and Communication Systems
M.Sc.
Chemnitz
4 semesters English Full-time Winter semester Open admission No tuition fees
Mikrosysteme und Mikroelektronik
M.Sc.
Chemnitz
4 semesters German Full-time Winter semester Open admission No tuition fees
Renewable Energy Systems
M.Sc.
Chemnitz
4 semesters German Full-time Winter semester and Summer semester Open admission No tuition fees
Technologie und Management in der Halbleiterfertigung
M.Sc.Planned
Chemnitz
4 semesters German Full-time, Part-time Winter semester and Summer semester Open admission No tuition fees